1/21/2012	12:04:28 AM	Main Vac valve closed
1/21/2012	12:05:10 AM	Main Vac valve opened
1/21/2012	12:06:15 AM	Recipe started at 12:06 AM
1/21/2012	12:06:15 AM	Helium valve closed
1/21/2012	12:06:15 AM	H2 valve closed
1/21/2012	12:06:15 AM	BCl3 valve closed
1/21/2012	12:06:15 AM	PH3 valve closed
1/21/2012	12:06:15 AM	SiCl4 pre valve closed
1/21/2012	12:06:15 AM	SiCl4 post valve closed
1/21/2012	12:06:15 AM	Bypass valve closed
1/21/2012	12:06:15 AM	Bubbler valve closed
1/21/2012	12:06:15 AM	Main Vac valve opened
1/21/2012	12:06:15 AM	Helium MFC set to  0.000000
1/21/2012	12:06:15 AM	H2 MFC set to  0.000000
1/21/2012	12:06:15 AM	BCl3 MFC set to  0.000000
1/21/2012	12:06:15 AM	PH3 MFC set to  0.000000
1/21/2012	12:06:15 AM	SiCl4 MFC set to  0.000000
1/21/2012	12:06:15 AM	Bypass solenoid MFC set to  0.000000
1/21/2012	12:06:15 AM	Tube furnace set to 0
1/21/2012	12:06:25 AM	Helium valve closed
1/21/2012	12:06:25 AM	H2 valve closed
1/21/2012	12:06:25 AM	BCl3 valve closed
1/21/2012	12:06:25 AM	PH3 valve closed
1/21/2012	12:06:25 AM	SiCl4 pre valve closed
1/21/2012	12:06:25 AM	SiCl4 post valve closed
1/21/2012	12:06:25 AM	Main Vac valve closed
1/21/2012	12:06:25 AM	Bypass valve closed
1/21/2012	12:06:25 AM	Bubbler valve closed
1/21/2012	12:06:25 AM	Helium MFC set to  0.000000
1/21/2012	12:06:25 AM	H2 MFC set to  0.000000
1/21/2012	12:06:25 AM	BCl3 MFC set to  0.000000
1/21/2012	12:06:25 AM	PH3 MFC set to  0.000000
1/21/2012	12:06:25 AM	SiCl4 MFC set to  0.000000
1/21/2012	12:06:25 AM	Bypass solenoid MFC set to  0.000000
1/21/2012	12:06:25 AM	Tube furnace set to 0
1/21/2012	12:06:28 AM	Helium valve closed
1/21/2012	12:06:28 AM	BCl3 valve closed
1/21/2012	12:06:28 AM	PH3 valve closed
1/21/2012	12:06:28 AM	SiCl4 pre valve closed
1/21/2012	12:06:28 AM	SiCl4 post valve closed
1/21/2012	12:06:28 AM	Main Vac valve closed
1/21/2012	12:06:28 AM	Bypass valve closed
1/21/2012	12:06:28 AM	Bubbler valve closed
1/21/2012	12:06:28 AM	H2 valve opened
1/21/2012	12:06:28 AM	Helium MFC set to  0.000000
1/21/2012	12:06:28 AM	H2 MFC set to  500.000000
1/21/2012	12:06:28 AM	BCl3 MFC set to  0.000000
1/21/2012	12:06:29 AM	PH3 MFC set to  0.000000
1/21/2012	12:06:29 AM	SiCl4 MFC set to  0.000000
1/21/2012	12:06:29 AM	Bypass solenoid MFC set to  0.000000
1/21/2012	12:06:29 AM	Tube furnace set to 0
1/21/2012	12:07:34 AM	Helium valve closed
1/21/2012	12:07:34 AM	BCl3 valve closed
1/21/2012	12:07:34 AM	PH3 valve closed
1/21/2012	12:07:34 AM	SiCl4 pre valve closed
1/21/2012	12:07:34 AM	SiCl4 post valve closed
1/21/2012	12:07:34 AM	Main Vac valve closed
1/21/2012	12:07:34 AM	Bypass valve closed
1/21/2012	12:07:34 AM	H2 valve opened
1/21/2012	12:07:34 AM	Bubbler valve opened
1/21/2012	12:07:34 AM	Helium MFC set to  0.000000
1/21/2012	12:07:34 AM	H2 MFC set to  500.000000
1/21/2012	12:07:34 AM	BCl3 MFC set to  0.000000
1/21/2012	12:07:34 AM	PH3 MFC set to  0.000000
1/21/2012	12:07:34 AM	SiCl4 MFC set to  0.000000
1/21/2012	12:07:34 AM	Bypass solenoid MFC set to  0.000000
1/21/2012	12:07:34 AM	Tube furnace set to 0
1/21/2012	12:07:35 AM	Helium valve closed
1/21/2012	12:07:35 AM	BCl3 valve closed
1/21/2012	12:07:35 AM	PH3 valve closed
1/21/2012	12:07:35 AM	SiCl4 pre valve closed
1/21/2012	12:07:35 AM	SiCl4 post valve closed
1/21/2012	12:07:35 AM	Main Vac valve closed
1/21/2012	12:07:35 AM	Bypass valve closed
1/21/2012	12:07:35 AM	H2 valve opened
1/21/2012	12:07:35 AM	Bubbler valve opened
1/21/2012	12:07:35 AM	Helium MFC set to  0.000000
1/21/2012	12:07:35 AM	H2 MFC set to  500.000000
1/21/2012	12:07:35 AM	BCl3 MFC set to  0.000000
1/21/2012	12:07:35 AM	PH3 MFC set to  0.000000
1/21/2012	12:07:35 AM	SiCl4 MFC set to  0.000000
1/21/2012	12:07:35 AM	Bypass solenoid MFC set to  0.000000
1/21/2012	12:07:36 AM	Tube furnace set to 1000
1/21/2012	12:32:36 AM	Helium valve closed
1/21/2012	12:32:36 AM	PH3 valve closed
1/21/2012	12:32:36 AM	Main Vac valve closed
1/21/2012	12:32:36 AM	Bypass valve closed
1/21/2012	12:32:36 AM	H2 valve opened
1/21/2012	12:32:36 AM	BCl3 valve opened
1/21/2012	12:32:36 AM	SiCl4 pre valve opened
1/21/2012	12:32:36 AM	SiCl4 post valve opened
1/21/2012	12:32:36 AM	Bubbler valve opened
1/21/2012	12:32:36 AM	Helium MFC set to  0.000000
1/21/2012	12:32:36 AM	H2 MFC set to  450.000000
1/21/2012	12:32:36 AM	BCl3 MFC set to  1.500000
1/21/2012	12:32:36 AM	PH3 MFC set to  0.000000
1/21/2012	12:32:36 AM	SiCl4 MFC set to  50.000000
1/21/2012	12:32:36 AM	Bypass solenoid MFC set to  0.000000
1/21/2012	12:32:36 AM	Tube furnace set to 1000
1/21/2012	1:12:36 AM	Helium valve closed
1/21/2012	1:12:36 AM	BCl3 valve closed
1/21/2012	1:12:36 AM	PH3 valve closed
1/21/2012	1:12:36 AM	SiCl4 pre valve closed
1/21/2012	1:12:36 AM	SiCl4 post valve closed
1/21/2012	1:12:36 AM	Main Vac valve closed
1/21/2012	1:12:36 AM	Bypass valve closed
1/21/2012	1:12:36 AM	H2 valve opened
1/21/2012	1:12:36 AM	Bubbler valve opened
1/21/2012	1:12:36 AM	Helium MFC set to  0.000000
1/21/2012	1:12:36 AM	H2 MFC set to  500.000000
1/21/2012	1:12:36 AM	BCl3 MFC set to  0.000000
1/21/2012	1:12:36 AM	PH3 MFC set to  0.000000
1/21/2012	1:12:36 AM	SiCl4 MFC set to  0.000000
1/21/2012	1:12:36 AM	Bypass solenoid MFC set to  0.000000
1/21/2012	1:12:36 AM	Tube furnace set to 750
1/21/2012	1:27:36 AM	H2 valve closed
1/21/2012	1:27:36 AM	BCl3 valve closed
1/21/2012	1:27:36 AM	PH3 valve closed
1/21/2012	1:27:36 AM	SiCl4 pre valve closed
1/21/2012	1:27:36 AM	SiCl4 post valve closed
1/21/2012	1:27:36 AM	Main Vac valve closed
1/21/2012	1:27:36 AM	Bypass valve closed
1/21/2012	1:27:36 AM	Helium valve opened
1/21/2012	1:27:36 AM	Bubbler valve opened
1/21/2012	1:27:36 AM	Helium MFC set to  500.000000
1/21/2012	1:27:36 AM	H2 MFC set to  0.000000
1/21/2012	1:27:36 AM	BCl3 MFC set to  0.000000
1/21/2012	1:27:36 AM	PH3 MFC set to  0.000000
1/21/2012	1:27:36 AM	SiCl4 MFC set to  0.000000
1/21/2012	1:27:36 AM	Bypass solenoid MFC set to  0.000000
1/21/2012	1:27:36 AM	Tube furnace set to 0
1/21/2012	1:47:36 AM	Helium valve closed
1/21/2012	1:47:36 AM	H2 valve closed
1/21/2012	1:47:36 AM	BCl3 valve closed
1/21/2012	1:47:36 AM	PH3 valve closed
1/21/2012	1:47:36 AM	SiCl4 pre valve closed
1/21/2012	1:47:36 AM	SiCl4 post valve closed
1/21/2012	1:47:36 AM	Main Vac valve closed
1/21/2012	1:47:36 AM	Bypass valve closed
1/21/2012	1:47:36 AM	Bubbler valve closed
1/21/2012	1:47:36 AM	Helium MFC set to  0.000000
1/21/2012	1:47:36 AM	H2 MFC set to  0.000000
1/21/2012	1:47:36 AM	BCl3 MFC set to  0.000000
1/21/2012	1:47:36 AM	PH3 MFC set to  0.000000
1/21/2012	1:47:36 AM	SiCl4 MFC set to  0.000000
1/21/2012	1:47:36 AM	Bypass solenoid MFC set to  0.000000
1/21/2012	1:47:36 AM	Tube furnace set to 0
1/21/2012	2:07:36 AM	Helium valve closed
1/21/2012	2:07:36 AM	H2 valve closed
1/21/2012	2:07:36 AM	BCl3 valve closed
1/21/2012	2:07:36 AM	PH3 valve closed
1/21/2012	2:07:36 AM	SiCl4 pre valve closed
1/21/2012	2:07:36 AM	SiCl4 post valve closed
1/21/2012	2:07:36 AM	Main Vac valve closed
1/21/2012	2:07:36 AM	Bubbler valve closed
1/21/2012	2:07:36 AM	Bypass valve opened
1/21/2012	2:07:36 AM	Helium MFC set to  0.000000
1/21/2012	2:07:36 AM	H2 MFC set to  0.000000
1/21/2012	2:07:36 AM	BCl3 MFC set to  0.000000
1/21/2012	2:07:36 AM	PH3 MFC set to  0.000000
1/21/2012	2:07:36 AM	SiCl4 MFC set to  0.000000
1/21/2012	2:07:36 AM	Bypass solenoid MFC set to  0.000000
1/21/2012	2:07:36 AM	Tube furnace set to 0
1/21/2012	2:08:20 AM	Helium valve closed
1/21/2012	2:08:20 AM	H2 valve closed
1/21/2012	2:08:20 AM	BCl3 valve closed
1/21/2012	2:08:20 AM	PH3 valve closed
1/21/2012	2:08:20 AM	SiCl4 pre valve closed
1/21/2012	2:08:20 AM	SiCl4 post valve closed
1/21/2012	2:08:20 AM	Main Vac valve closed
1/21/2012	2:08:20 AM	Bubbler valve closed
1/21/2012	2:08:20 AM	Bypass valve opened
1/21/2012	2:08:20 AM	Helium MFC set to  0.000000
1/21/2012	2:08:20 AM	H2 MFC set to  0.000000
1/21/2012	2:08:20 AM	BCl3 MFC set to  0.000000
1/21/2012	2:08:20 AM	PH3 MFC set to  0.000000
1/21/2012	2:08:20 AM	SiCl4 MFC set to  0.000000
1/21/2012	2:08:20 AM	Bypass solenoid MFC set to  0.000000
1/21/2012	2:08:20 AM	Tube furnace set to 0
1/21/2012	2:09:20 AM	Helium valve closed
1/21/2012	2:09:20 AM	H2 valve closed
1/21/2012	2:09:20 AM	BCl3 valve closed
1/21/2012	2:09:20 AM	PH3 valve closed
1/21/2012	2:09:20 AM	SiCl4 pre valve closed
1/21/2012	2:09:20 AM	SiCl4 post valve closed
1/21/2012	2:09:20 AM	Bypass valve closed
1/21/2012	2:09:20 AM	Bubbler valve closed
1/21/2012	2:09:20 AM	Main Vac valve opened
1/21/2012	2:09:20 AM	Helium MFC set to  0.000000
1/21/2012	2:09:20 AM	H2 MFC set to  0.000000
1/21/2012	2:09:20 AM	BCl3 MFC set to  0.000000
1/21/2012	2:09:20 AM	PH3 MFC set to  0.000000
1/21/2012	2:09:20 AM	SiCl4 MFC set to  0.000000
1/21/2012	2:09:20 AM	Bypass solenoid MFC set to  0.000000
1/21/2012	2:09:20 AM	Tube furnace set to 0
1/21/2012	3:09:20 AM	Run finished at 3:09 AM
1/21/2012	4:09:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/21/2012	4:09:44 AM	Recipe started at 4:09 AM
1/21/2012	4:09:44 AM	Helium valve closed
1/21/2012	4:09:44 AM	H2 valve closed
1/21/2012	4:09:44 AM	BCl3 valve closed
1/21/2012	4:09:44 AM	PH3 valve closed
1/21/2012	4:09:44 AM	SiCl4 pre valve closed
1/21/2012	4:09:44 AM	SiCl4 post valve closed
1/21/2012	4:09:44 AM	Main Vac valve closed
1/21/2012	4:09:44 AM	Bypass valve closed
1/21/2012	4:09:44 AM	Bubbler valve closed
1/21/2012	4:09:44 AM	Helium MFC set to  0.000000
1/21/2012	4:09:44 AM	H2 MFC set to  0.000000
1/21/2012	4:09:44 AM	BCl3 MFC set to  0.000000
1/21/2012	4:09:44 AM	PH3 MFC set to  0.000000
1/21/2012	4:09:44 AM	SiCl4 MFC set to  0.000000
1/21/2012	4:09:44 AM	Bypass solenoid MFC set to  0.000000
1/21/2012	4:09:44 AM	Tube furnace set to 0
1/21/2012	4:09:47 AM	H2 valve closed
1/21/2012	4:09:47 AM	BCl3 valve closed
1/21/2012	4:09:47 AM	PH3 valve closed
1/21/2012	4:09:47 AM	SiCl4 pre valve closed
1/21/2012	4:09:47 AM	SiCl4 post valve closed
1/21/2012	4:09:47 AM	Main Vac valve closed
1/21/2012	4:09:47 AM	Bypass valve closed
1/21/2012	4:09:47 AM	Bubbler valve closed
1/21/2012	4:09:47 AM	Helium valve opened
1/21/2012	4:09:47 AM	Helium MFC set to  500.000000
1/21/2012	4:09:47 AM	H2 MFC set to  0.000000
1/21/2012	4:09:47 AM	BCl3 MFC set to  0.000000
1/21/2012	4:09:47 AM	PH3 MFC set to  0.000000
1/21/2012	4:09:47 AM	SiCl4 MFC set to  0.000000
1/21/2012	4:09:47 AM	Bypass solenoid MFC set to  0.000000
1/21/2012	4:09:47 AM	Tube furnace set to 0
1/21/2012	4:10:50 AM	Helium valve closed
1/21/2012	4:10:50 AM	H2 valve closed
1/21/2012	4:10:50 AM	BCl3 valve closed
1/21/2012	4:10:50 AM	PH3 valve closed
1/21/2012	4:10:50 AM	SiCl4 pre valve closed
1/21/2012	4:10:50 AM	SiCl4 post valve closed
1/21/2012	4:10:50 AM	Main Vac valve closed
1/21/2012	4:10:50 AM	Bypass valve closed
1/21/2012	4:10:50 AM	Bubbler valve closed
1/21/2012	4:10:50 AM	Helium MFC set to  0.000000
1/21/2012	4:10:50 AM	H2 MFC set to  0.000000
1/21/2012	4:10:50 AM	BCl3 MFC set to  0.000000
1/21/2012	4:10:50 AM	PH3 MFC set to  0.000000
1/21/2012	4:10:51 AM	SiCl4 MFC set to  0.000000
1/21/2012	4:10:51 AM	Bypass solenoid MFC set to  0.000000
1/21/2012	4:10:51 AM	Tube furnace set to 0
1/21/2012	4:10:52 AM	Run finished at 4:10 AM
1/21/2012	4:10:52 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/21/2012	4:17:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/21/2012	4:17:45 AM	Recipe started at 4:17 AM
1/21/2012	4:17:45 AM	Helium valve closed
1/21/2012	4:17:45 AM	H2 valve closed
1/21/2012	4:17:45 AM	BCl3 valve closed
1/21/2012	4:17:45 AM	PH3 valve closed
1/21/2012	4:17:45 AM	SiCl4 pre valve closed
1/21/2012	4:17:45 AM	SiCl4 post valve closed
1/21/2012	4:17:45 AM	Main Vac valve closed
1/21/2012	4:17:45 AM	Bubbler valve closed
1/21/2012	4:17:45 AM	Bypass valve opened
1/21/2012	4:17:45 AM	Helium MFC set to  0.000000
1/21/2012	4:17:45 AM	H2 MFC set to  0.000000
1/21/2012	4:17:45 AM	BCl3 MFC set to  0.000000
1/21/2012	4:17:45 AM	PH3 MFC set to  0.000000
1/21/2012	4:17:45 AM	SiCl4 MFC set to  0.000000
1/21/2012	4:17:45 AM	Bypass solenoid MFC set to  0.000000
1/21/2012	4:17:45 AM	Tube furnace set to 0
1/21/2012	4:18:42 AM	Helium valve closed
1/21/2012	4:18:42 AM	H2 valve closed
1/21/2012	4:18:42 AM	BCl3 valve closed
1/21/2012	4:18:42 AM	PH3 valve closed
1/21/2012	4:18:42 AM	SiCl4 pre valve closed
1/21/2012	4:18:42 AM	SiCl4 post valve closed
1/21/2012	4:18:42 AM	Main Vac valve closed
1/21/2012	4:18:42 AM	Bubbler valve closed
1/21/2012	4:18:42 AM	Bypass valve opened
1/21/2012	4:18:42 AM	Helium MFC set to  0.000000
1/21/2012	4:18:42 AM	H2 MFC set to  0.000000
1/21/2012	4:18:42 AM	BCl3 MFC set to  0.000000
1/21/2012	4:18:42 AM	PH3 MFC set to  0.000000
1/21/2012	4:18:42 AM	SiCl4 MFC set to  0.000000
1/21/2012	4:18:42 AM	Bypass solenoid MFC set to  0.000000
1/21/2012	4:18:42 AM	Tube furnace set to 0
1/21/2012	4:19:42 AM	Helium valve closed
1/21/2012	4:19:42 AM	H2 valve closed
1/21/2012	4:19:42 AM	BCl3 valve closed
1/21/2012	4:19:42 AM	PH3 valve closed
1/21/2012	4:19:42 AM	SiCl4 pre valve closed
1/21/2012	4:19:42 AM	SiCl4 post valve closed
1/21/2012	4:19:42 AM	Bypass valve closed
1/21/2012	4:19:42 AM	Bubbler valve closed
1/21/2012	4:19:42 AM	Main Vac valve opened
1/21/2012	4:19:42 AM	Helium MFC set to  0.000000
1/21/2012	4:19:42 AM	H2 MFC set to  0.000000
1/21/2012	4:19:42 AM	BCl3 MFC set to  0.000000
1/21/2012	4:19:42 AM	PH3 MFC set to  0.000000
1/21/2012	4:19:42 AM	SiCl4 MFC set to  0.000000
1/21/2012	4:19:42 AM	Bypass solenoid MFC set to  0.000000
1/21/2012	4:19:42 AM	Tube furnace set to 0
1/21/2012	4:19:43 AM	Run finished at 4:19 AM
1/21/2012	4:19:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/21/2012	4:25:17 AM	Recipe started at 4:25 AM
1/21/2012	4:25:17 AM	Helium valve closed
1/21/2012	4:25:17 AM	H2 valve closed
1/21/2012	4:25:17 AM	BCl3 valve closed
1/21/2012	4:25:17 AM	PH3 valve closed
1/21/2012	4:25:17 AM	SiCl4 pre valve closed
1/21/2012	4:25:17 AM	SiCl4 post valve closed
1/21/2012	4:25:17 AM	Bypass valve closed
1/21/2012	4:25:17 AM	Bubbler valve closed
1/21/2012	4:25:17 AM	Main Vac valve opened
1/21/2012	4:25:17 AM	Helium MFC set to  0.000000
1/21/2012	4:25:17 AM	H2 MFC set to  0.000000
1/21/2012	4:25:17 AM	BCl3 MFC set to  0.000000
1/21/2012	4:25:17 AM	PH3 MFC set to  0.000000
1/21/2012	4:25:17 AM	SiCl4 MFC set to  0.000000
1/21/2012	4:25:17 AM	Bypass solenoid MFC set to  0.000000
1/21/2012	4:25:17 AM	Tube furnace set to 100
1/21/2012	5:55:17 AM	Helium valve closed
1/21/2012	5:55:17 AM	H2 valve closed
1/21/2012	5:55:17 AM	BCl3 valve closed
1/21/2012	5:55:17 AM	PH3 valve closed
1/21/2012	5:55:17 AM	SiCl4 pre valve closed
1/21/2012	5:55:17 AM	SiCl4 post valve closed
1/21/2012	5:55:17 AM	Main Vac valve closed
1/21/2012	5:55:17 AM	Bypass valve closed
1/21/2012	5:55:17 AM	Bubbler valve closed
1/21/2012	5:55:17 AM	Helium MFC set to  0.000000
1/21/2012	5:55:17 AM	H2 MFC set to  0.000000
1/21/2012	5:55:17 AM	BCl3 MFC set to  0.000000
1/21/2012	5:55:17 AM	PH3 MFC set to  0.000000
1/21/2012	5:55:17 AM	SiCl4 MFC set to  0.000000
1/21/2012	5:55:17 AM	Bypass solenoid MFC set to  0.000000
1/21/2012	5:55:17 AM	Tube furnace set to 1000
1/21/2012	5:55:20 AM	Helium valve closed
1/21/2012	5:55:20 AM	BCl3 valve closed
1/21/2012	5:55:20 AM	PH3 valve closed
1/21/2012	5:55:20 AM	SiCl4 pre valve closed
1/21/2012	5:55:20 AM	SiCl4 post valve closed
1/21/2012	5:55:20 AM	Main Vac valve closed
1/21/2012	5:55:20 AM	Bypass valve closed
1/21/2012	5:55:20 AM	Bubbler valve closed
1/21/2012	5:55:20 AM	H2 valve opened
1/21/2012	5:55:20 AM	Helium MFC set to  0.000000
1/21/2012	5:55:20 AM	H2 MFC set to  500.000000
1/21/2012	5:55:20 AM	BCl3 MFC set to  0.000000
1/21/2012	5:55:20 AM	PH3 MFC set to  0.000000
1/21/2012	5:55:20 AM	SiCl4 MFC set to  0.000000
1/21/2012	5:55:20 AM	Bypass solenoid MFC set to  0.000000
1/21/2012	5:55:21 AM	Tube furnace set to 1000
1/21/2012	5:56:26 AM	Helium valve closed
1/21/2012	5:56:26 AM	BCl3 valve closed
1/21/2012	5:56:26 AM	PH3 valve closed
1/21/2012	5:56:26 AM	SiCl4 pre valve closed
1/21/2012	5:56:26 AM	SiCl4 post valve closed
1/21/2012	5:56:26 AM	Main Vac valve closed
1/21/2012	5:56:26 AM	Bypass valve closed
1/21/2012	5:56:26 AM	H2 valve opened
1/21/2012	5:56:26 AM	Bubbler valve opened
1/21/2012	5:56:26 AM	Helium MFC set to  0.000000
1/21/2012	5:56:26 AM	H2 MFC set to  500.000000
1/21/2012	5:56:26 AM	BCl3 MFC set to  0.000000
1/21/2012	5:56:26 AM	PH3 MFC set to  0.000000
1/21/2012	5:56:26 AM	SiCl4 MFC set to  0.000000
1/21/2012	5:56:26 AM	Bypass solenoid MFC set to  0.000000
1/21/2012	5:56:26 AM	Tube furnace set to 1000
1/21/2012	5:56:27 AM	Helium valve closed
1/21/2012	5:56:27 AM	BCl3 valve closed
1/21/2012	5:56:27 AM	PH3 valve closed
1/21/2012	5:56:27 AM	SiCl4 pre valve closed
1/21/2012	5:56:27 AM	SiCl4 post valve closed
1/21/2012	5:56:27 AM	Main Vac valve closed
1/21/2012	5:56:27 AM	Bypass valve closed
1/21/2012	5:56:27 AM	H2 valve opened
1/21/2012	5:56:27 AM	Bubbler valve opened
1/21/2012	5:56:27 AM	Helium MFC set to  0.000000
1/21/2012	5:56:27 AM	H2 MFC set to  500.000000
1/21/2012	5:56:27 AM	BCl3 MFC set to  0.000000
1/21/2012	5:56:27 AM	PH3 MFC set to  0.000000
1/21/2012	5:56:27 AM	SiCl4 MFC set to  0.000000
1/21/2012	5:56:27 AM	Bypass solenoid MFC set to  0.000000
1/21/2012	5:56:27 AM	Tube furnace set to 1000
1/21/2012	6:16:27 AM	Helium valve closed
1/21/2012	6:16:27 AM	PH3 valve closed
1/21/2012	6:16:27 AM	Main Vac valve closed
1/21/2012	6:16:27 AM	Bypass valve closed
1/21/2012	6:16:27 AM	H2 valve opened
1/21/2012	6:16:27 AM	BCl3 valve opened
1/21/2012	6:16:27 AM	SiCl4 pre valve opened
1/21/2012	6:16:27 AM	SiCl4 post valve opened
1/21/2012	6:16:27 AM	Bubbler valve opened
1/21/2012	6:16:27 AM	Helium MFC set to  0.000000
1/21/2012	6:16:27 AM	H2 MFC set to  450.000000
1/21/2012	6:16:27 AM	BCl3 MFC set to  1.500000
1/21/2012	6:16:27 AM	PH3 MFC set to  0.000000
1/21/2012	6:16:27 AM	SiCl4 MFC set to  50.000000
1/21/2012	6:16:27 AM	Bypass solenoid MFC set to  0.000000
1/21/2012	6:16:27 AM	Tube furnace set to 1000
1/21/2012	6:46:27 AM	Helium valve closed
1/21/2012	6:46:27 AM	BCl3 valve closed
1/21/2012	6:46:27 AM	PH3 valve closed
1/21/2012	6:46:27 AM	SiCl4 pre valve closed
1/21/2012	6:46:27 AM	SiCl4 post valve closed
1/21/2012	6:46:27 AM	Main Vac valve closed
1/21/2012	6:46:27 AM	Bypass valve closed
1/21/2012	6:46:27 AM	H2 valve opened
1/21/2012	6:46:27 AM	Bubbler valve opened
1/21/2012	6:46:27 AM	Helium MFC set to  0.000000
1/21/2012	6:46:27 AM	H2 MFC set to  500.000000
1/21/2012	6:46:27 AM	BCl3 MFC set to  0.000000
1/21/2012	6:46:27 AM	PH3 MFC set to  0.000000
1/21/2012	6:46:27 AM	SiCl4 MFC set to  0.000000
1/21/2012	6:46:27 AM	Bypass solenoid MFC set to  0.000000
1/21/2012	6:46:27 AM	Tube furnace set to 750
1/21/2012	7:01:27 AM	H2 valve closed
1/21/2012	7:01:27 AM	BCl3 valve closed
1/21/2012	7:01:27 AM	PH3 valve closed
1/21/2012	7:01:27 AM	SiCl4 pre valve closed
1/21/2012	7:01:27 AM	SiCl4 post valve closed
1/21/2012	7:01:27 AM	Main Vac valve closed
1/21/2012	7:01:27 AM	Bypass valve closed
1/21/2012	7:01:27 AM	Helium valve opened
1/21/2012	7:01:27 AM	Bubbler valve opened
1/21/2012	7:01:27 AM	Helium MFC set to  500.000000
1/21/2012	7:01:27 AM	H2 MFC set to  0.000000
1/21/2012	7:01:27 AM	BCl3 MFC set to  0.000000
1/21/2012	7:01:27 AM	PH3 MFC set to  0.000000
1/21/2012	7:01:27 AM	SiCl4 MFC set to  0.000000
1/21/2012	7:01:27 AM	Bypass solenoid MFC set to  0.000000
1/21/2012	7:01:28 AM	Tube furnace set to 0
1/21/2012	7:21:28 AM	Helium valve closed
1/21/2012	7:21:28 AM	H2 valve closed
1/21/2012	7:21:28 AM	BCl3 valve closed
1/21/2012	7:21:28 AM	PH3 valve closed
1/21/2012	7:21:28 AM	SiCl4 pre valve closed
1/21/2012	7:21:28 AM	SiCl4 post valve closed
1/21/2012	7:21:28 AM	Main Vac valve closed
1/21/2012	7:21:28 AM	Bypass valve closed
1/21/2012	7:21:28 AM	Bubbler valve closed
1/21/2012	7:21:28 AM	Helium MFC set to  0.000000
1/21/2012	7:21:28 AM	H2 MFC set to  0.000000
1/21/2012	7:21:28 AM	BCl3 MFC set to  0.000000
1/21/2012	7:21:28 AM	PH3 MFC set to  0.000000
1/21/2012	7:21:28 AM	SiCl4 MFC set to  0.000000
1/21/2012	7:21:28 AM	Bypass solenoid MFC set to  0.000000
1/21/2012	7:21:28 AM	Tube furnace set to 0
1/21/2012	7:41:28 AM	Helium valve closed
1/21/2012	7:41:28 AM	H2 valve closed
1/21/2012	7:41:28 AM	BCl3 valve closed
1/21/2012	7:41:28 AM	PH3 valve closed
1/21/2012	7:41:28 AM	SiCl4 pre valve closed
1/21/2012	7:41:28 AM	SiCl4 post valve closed
1/21/2012	7:41:28 AM	Main Vac valve closed
1/21/2012	7:41:28 AM	Bubbler valve closed
1/21/2012	7:41:28 AM	Bypass valve opened
1/21/2012	7:41:28 AM	Helium MFC set to  0.000000
1/21/2012	7:41:28 AM	H2 MFC set to  0.000000
1/21/2012	7:41:28 AM	BCl3 MFC set to  0.000000
1/21/2012	7:41:28 AM	PH3 MFC set to  0.000000
1/21/2012	7:41:28 AM	SiCl4 MFC set to  0.000000
1/21/2012	7:41:28 AM	Bypass solenoid MFC set to  0.000000
1/21/2012	7:41:28 AM	Tube furnace set to 0
1/21/2012	7:42:12 AM	Helium valve closed
1/21/2012	7:42:12 AM	H2 valve closed
1/21/2012	7:42:12 AM	BCl3 valve closed
1/21/2012	7:42:12 AM	PH3 valve closed
1/21/2012	7:42:12 AM	SiCl4 pre valve closed
1/21/2012	7:42:12 AM	SiCl4 post valve closed
1/21/2012	7:42:12 AM	Main Vac valve closed
1/21/2012	7:42:12 AM	Bubbler valve closed
1/21/2012	7:42:12 AM	Bypass valve opened
1/21/2012	7:42:12 AM	Helium MFC set to  0.000000
1/21/2012	7:42:12 AM	H2 MFC set to  0.000000
1/21/2012	7:42:12 AM	BCl3 MFC set to  0.000000
1/21/2012	7:42:12 AM	PH3 MFC set to  0.000000
1/21/2012	7:42:12 AM	SiCl4 MFC set to  0.000000
1/21/2012	7:42:12 AM	Bypass solenoid MFC set to  0.000000
1/21/2012	7:42:12 AM	Tube furnace set to 0
1/21/2012	7:43:12 AM	Helium valve closed
1/21/2012	7:43:12 AM	H2 valve closed
1/21/2012	7:43:12 AM	BCl3 valve closed
1/21/2012	7:43:12 AM	PH3 valve closed
1/21/2012	7:43:12 AM	SiCl4 pre valve closed
1/21/2012	7:43:12 AM	SiCl4 post valve closed
1/21/2012	7:43:12 AM	Bypass valve closed
1/21/2012	7:43:12 AM	Bubbler valve closed
1/21/2012	7:43:12 AM	Main Vac valve opened
1/21/2012	7:43:12 AM	Helium MFC set to  0.000000
1/21/2012	7:43:12 AM	H2 MFC set to  0.000000
1/21/2012	7:43:12 AM	BCl3 MFC set to  0.000000
1/21/2012	7:43:12 AM	PH3 MFC set to  0.000000
1/21/2012	7:43:12 AM	SiCl4 MFC set to  0.000000
1/21/2012	7:43:12 AM	Bypass solenoid MFC set to  0.000000
1/21/2012	7:43:13 AM	Tube furnace set to 0
1/21/2012	8:43:13 AM	Run finished at 8:43 AM
1/21/2012	12:41:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/21/2012	12:41:30 PM	Recipe started at 12:41 PM
1/21/2012	12:41:30 PM	Helium valve closed
1/21/2012	12:41:30 PM	H2 valve closed
1/21/2012	12:41:30 PM	BCl3 valve closed
1/21/2012	12:41:30 PM	PH3 valve closed
1/21/2012	12:41:30 PM	SiCl4 pre valve closed
1/21/2012	12:41:30 PM	SiCl4 post valve closed
1/21/2012	12:41:30 PM	Main Vac valve closed
1/21/2012	12:41:30 PM	Bypass valve closed
1/21/2012	12:41:30 PM	Bubbler valve closed
1/21/2012	12:41:30 PM	Helium MFC set to  0.000000
1/21/2012	12:41:30 PM	H2 MFC set to  0.000000
1/21/2012	12:41:30 PM	BCl3 MFC set to  0.000000
1/21/2012	12:41:30 PM	PH3 MFC set to  0.000000
1/21/2012	12:41:30 PM	SiCl4 MFC set to  0.000000
1/21/2012	12:41:30 PM	Bypass solenoid MFC set to  0.000000
1/21/2012	12:41:30 PM	Tube furnace set to 0
1/21/2012	12:41:33 PM	H2 valve closed
1/21/2012	12:41:33 PM	BCl3 valve closed
1/21/2012	12:41:33 PM	PH3 valve closed
1/21/2012	12:41:33 PM	SiCl4 pre valve closed
1/21/2012	12:41:33 PM	SiCl4 post valve closed
1/21/2012	12:41:33 PM	Main Vac valve closed
1/21/2012	12:41:33 PM	Bypass valve closed
1/21/2012	12:41:33 PM	Bubbler valve closed
1/21/2012	12:41:33 PM	Helium valve opened
1/21/2012	12:41:33 PM	Helium MFC set to  500.000000
1/21/2012	12:41:33 PM	H2 MFC set to  0.000000
1/21/2012	12:41:33 PM	BCl3 MFC set to  0.000000
1/21/2012	12:41:33 PM	PH3 MFC set to  0.000000
1/21/2012	12:41:33 PM	SiCl4 MFC set to  0.000000
1/21/2012	12:41:33 PM	Bypass solenoid MFC set to  0.000000
1/21/2012	12:41:34 PM	Tube furnace set to 0
1/21/2012	12:42:39 PM	Helium valve closed
1/21/2012	12:42:39 PM	H2 valve closed
1/21/2012	12:42:39 PM	BCl3 valve closed
1/21/2012	12:42:39 PM	PH3 valve closed
1/21/2012	12:42:39 PM	SiCl4 pre valve closed
1/21/2012	12:42:39 PM	SiCl4 post valve closed
1/21/2012	12:42:39 PM	Main Vac valve closed
1/21/2012	12:42:39 PM	Bypass valve closed
1/21/2012	12:42:39 PM	Bubbler valve closed
1/21/2012	12:42:39 PM	Helium MFC set to  0.000000
1/21/2012	12:42:39 PM	H2 MFC set to  0.000000
1/21/2012	12:42:39 PM	BCl3 MFC set to  0.000000
1/21/2012	12:42:39 PM	PH3 MFC set to  0.000000
1/21/2012	12:42:39 PM	SiCl4 MFC set to  0.000000
1/21/2012	12:42:39 PM	Bypass solenoid MFC set to  0.000000
1/21/2012	12:42:39 PM	Tube furnace set to 0
1/21/2012	12:42:40 PM	Run finished at 12:42 PM
1/21/2012	12:42:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/21/2012	12:47:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/21/2012	12:47:53 PM	Recipe started at 12:47 PM
1/21/2012	12:47:53 PM	Helium valve closed
1/21/2012	12:47:53 PM	H2 valve closed
1/21/2012	12:47:53 PM	BCl3 valve closed
1/21/2012	12:47:53 PM	PH3 valve closed
1/21/2012	12:47:53 PM	SiCl4 pre valve closed
1/21/2012	12:47:53 PM	SiCl4 post valve closed
1/21/2012	12:47:53 PM	Main Vac valve closed
1/21/2012	12:47:53 PM	Bubbler valve closed
1/21/2012	12:47:53 PM	Bypass valve opened
1/21/2012	12:47:53 PM	Helium MFC set to  0.000000
1/21/2012	12:47:53 PM	H2 MFC set to  0.000000
1/21/2012	12:47:53 PM	BCl3 MFC set to  0.000000
1/21/2012	12:47:53 PM	PH3 MFC set to  0.000000
1/21/2012	12:47:53 PM	SiCl4 MFC set to  0.000000
1/21/2012	12:47:53 PM	Bypass solenoid MFC set to  0.000000
1/21/2012	12:47:53 PM	Tube furnace set to 0
1/21/2012	12:48:53 PM	Helium valve closed
1/21/2012	12:48:53 PM	H2 valve closed
1/21/2012	12:48:53 PM	BCl3 valve closed
1/21/2012	12:48:53 PM	PH3 valve closed
1/21/2012	12:48:53 PM	SiCl4 pre valve closed
1/21/2012	12:48:53 PM	SiCl4 post valve closed
1/21/2012	12:48:53 PM	Main Vac valve closed
1/21/2012	12:48:53 PM	Bubbler valve closed
1/21/2012	12:48:53 PM	Bypass valve opened
1/21/2012	12:48:53 PM	Helium MFC set to  0.000000
1/21/2012	12:48:53 PM	H2 MFC set to  0.000000
1/21/2012	12:48:53 PM	BCl3 MFC set to  0.000000
1/21/2012	12:48:53 PM	PH3 MFC set to  0.000000
1/21/2012	12:48:53 PM	SiCl4 MFC set to  0.000000
1/21/2012	12:48:53 PM	Bypass solenoid MFC set to  0.000000
1/21/2012	12:48:53 PM	Tube furnace set to 0
1/21/2012	12:49:53 PM	Helium valve closed
1/21/2012	12:49:53 PM	H2 valve closed
1/21/2012	12:49:53 PM	BCl3 valve closed
1/21/2012	12:49:53 PM	PH3 valve closed
1/21/2012	12:49:53 PM	SiCl4 pre valve closed
1/21/2012	12:49:53 PM	SiCl4 post valve closed
1/21/2012	12:49:53 PM	Bypass valve closed
1/21/2012	12:49:53 PM	Bubbler valve closed
1/21/2012	12:49:53 PM	Main Vac valve opened
1/21/2012	12:49:53 PM	Helium MFC set to  0.000000
1/21/2012	12:49:53 PM	H2 MFC set to  0.000000
1/21/2012	12:49:53 PM	BCl3 MFC set to  0.000000
1/21/2012	12:49:53 PM	PH3 MFC set to  0.000000
1/21/2012	12:49:53 PM	SiCl4 MFC set to  0.000000
1/21/2012	12:49:53 PM	Bypass solenoid MFC set to  0.000000
1/21/2012	12:49:53 PM	Tube furnace set to 0
1/21/2012	12:49:54 PM	Run finished at 12:49 PM
1/21/2012	12:49:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/21/2012	3:50:48 PM	Main Vac valve closed
1/21/2012	3:51:03 PM	Main Vac valve opened
1/21/2012	3:51:46 PM	Recipe started at 3:51 PM
1/21/2012	3:51:46 PM	Helium valve closed
1/21/2012	3:51:46 PM	H2 valve closed
1/21/2012	3:51:46 PM	BCl3 valve closed
1/21/2012	3:51:46 PM	PH3 valve closed
1/21/2012	3:51:46 PM	SiCl4 pre valve closed
1/21/2012	3:51:46 PM	SiCl4 post valve closed
1/21/2012	3:51:46 PM	Bypass valve closed
1/21/2012	3:51:46 PM	Bubbler valve closed
1/21/2012	3:51:46 PM	Main Vac valve opened
1/21/2012	3:51:46 PM	Helium MFC set to  0.000000
1/21/2012	3:51:46 PM	H2 MFC set to  0.000000
1/21/2012	3:51:46 PM	BCl3 MFC set to  0.000000
1/21/2012	3:51:46 PM	PH3 MFC set to  0.000000
1/21/2012	3:51:46 PM	SiCl4 MFC set to  0.000000
1/21/2012	3:51:46 PM	Bypass solenoid MFC set to  0.000000
1/21/2012	3:51:46 PM	Tube furnace set to 100
1/21/2012	3:52:46 PM	Helium valve closed
1/21/2012	3:52:46 PM	H2 valve closed
1/21/2012	3:52:46 PM	BCl3 valve closed
1/21/2012	3:52:46 PM	PH3 valve closed
1/21/2012	3:52:46 PM	SiCl4 pre valve closed
1/21/2012	3:52:46 PM	SiCl4 post valve closed
1/21/2012	3:52:46 PM	Main Vac valve closed
1/21/2012	3:52:46 PM	Bypass valve closed
1/21/2012	3:52:46 PM	Bubbler valve closed
1/21/2012	3:52:46 PM	Helium MFC set to  0.000000
1/21/2012	3:52:46 PM	H2 MFC set to  0.000000
1/21/2012	3:52:46 PM	BCl3 MFC set to  0.000000
1/21/2012	3:52:46 PM	PH3 MFC set to  0.000000
1/21/2012	3:52:46 PM	SiCl4 MFC set to  0.000000
1/21/2012	3:52:46 PM	Bypass solenoid MFC set to  0.000000
1/21/2012	3:52:46 PM	Tube furnace set to 1000
1/21/2012	3:52:49 PM	Helium valve closed
1/21/2012	3:52:49 PM	BCl3 valve closed
1/21/2012	3:52:49 PM	PH3 valve closed
1/21/2012	3:52:49 PM	SiCl4 pre valve closed
1/21/2012	3:52:49 PM	SiCl4 post valve closed
1/21/2012	3:52:49 PM	Main Vac valve closed
1/21/2012	3:52:49 PM	Bypass valve closed
1/21/2012	3:52:49 PM	Bubbler valve closed
1/21/2012	3:52:49 PM	H2 valve opened
1/21/2012	3:52:49 PM	Helium MFC set to  0.000000
1/21/2012	3:52:49 PM	H2 MFC set to  500.000000
1/21/2012	3:52:49 PM	BCl3 MFC set to  0.000000
1/21/2012	3:52:49 PM	PH3 MFC set to  0.000000
1/21/2012	3:52:49 PM	SiCl4 MFC set to  0.000000
1/21/2012	3:52:49 PM	Bypass solenoid MFC set to  0.000000
1/21/2012	3:52:50 PM	Tube furnace set to 1000
1/21/2012	3:53:56 PM	Helium valve closed
1/21/2012	3:53:56 PM	BCl3 valve closed
1/21/2012	3:53:56 PM	PH3 valve closed
1/21/2012	3:53:56 PM	SiCl4 pre valve closed
1/21/2012	3:53:56 PM	SiCl4 post valve closed
1/21/2012	3:53:56 PM	Main Vac valve closed
1/21/2012	3:53:56 PM	Bypass valve closed
1/21/2012	3:53:56 PM	H2 valve opened
1/21/2012	3:53:56 PM	Bubbler valve opened
1/21/2012	3:53:56 PM	Helium MFC set to  0.000000
1/21/2012	3:53:56 PM	H2 MFC set to  500.000000
1/21/2012	3:53:56 PM	BCl3 MFC set to  0.000000
1/21/2012	3:53:56 PM	PH3 MFC set to  0.000000
1/21/2012	3:53:56 PM	SiCl4 MFC set to  0.000000
1/21/2012	3:53:56 PM	Bypass solenoid MFC set to  0.000000
1/21/2012	3:53:56 PM	Tube furnace set to 1000
1/21/2012	3:53:57 PM	Helium valve closed
1/21/2012	3:53:57 PM	BCl3 valve closed
1/21/2012	3:53:57 PM	PH3 valve closed
1/21/2012	3:53:57 PM	SiCl4 pre valve closed
1/21/2012	3:53:57 PM	SiCl4 post valve closed
1/21/2012	3:53:57 PM	Main Vac valve closed
1/21/2012	3:53:57 PM	Bypass valve closed
1/21/2012	3:53:57 PM	H2 valve opened
1/21/2012	3:53:57 PM	Bubbler valve opened
1/21/2012	3:53:57 PM	Helium MFC set to  0.000000
1/21/2012	3:53:57 PM	H2 MFC set to  500.000000
1/21/2012	3:53:57 PM	BCl3 MFC set to  0.000000
1/21/2012	3:53:57 PM	PH3 MFC set to  0.000000
1/21/2012	3:53:57 PM	SiCl4 MFC set to  0.000000
1/21/2012	3:53:57 PM	Bypass solenoid MFC set to  0.000000
1/21/2012	3:53:58 PM	Tube furnace set to 1000
1/21/2012	4:13:58 PM	Helium valve closed
1/21/2012	4:13:58 PM	PH3 valve closed
1/21/2012	4:13:58 PM	Main Vac valve closed
1/21/2012	4:13:58 PM	Bypass valve closed
1/21/2012	4:13:58 PM	H2 valve opened
1/21/2012	4:13:58 PM	BCl3 valve opened
1/21/2012	4:13:58 PM	SiCl4 pre valve opened
1/21/2012	4:13:58 PM	SiCl4 post valve opened
1/21/2012	4:13:58 PM	Bubbler valve opened
1/21/2012	4:13:58 PM	Helium MFC set to  0.000000
1/21/2012	4:13:58 PM	H2 MFC set to  450.000000
1/21/2012	4:13:58 PM	BCl3 MFC set to  1.500000
1/21/2012	4:13:58 PM	PH3 MFC set to  0.000000
1/21/2012	4:13:58 PM	SiCl4 MFC set to  50.000000
1/21/2012	4:13:58 PM	Bypass solenoid MFC set to  0.000000
1/21/2012	4:13:58 PM	Tube furnace set to 1000
1/21/2012	4:48:58 PM	Helium valve closed
1/21/2012	4:48:58 PM	BCl3 valve closed
1/21/2012	4:48:58 PM	PH3 valve closed
1/21/2012	4:48:58 PM	SiCl4 pre valve closed
1/21/2012	4:48:58 PM	SiCl4 post valve closed
1/21/2012	4:48:58 PM	Main Vac valve closed
1/21/2012	4:48:58 PM	Bypass valve closed
1/21/2012	4:48:58 PM	H2 valve opened
1/21/2012	4:48:58 PM	Bubbler valve opened
1/21/2012	4:48:58 PM	Helium MFC set to  0.000000
1/21/2012	4:48:58 PM	H2 MFC set to  500.000000
1/21/2012	4:48:58 PM	BCl3 MFC set to  0.000000
1/21/2012	4:48:58 PM	PH3 MFC set to  0.000000
1/21/2012	4:48:58 PM	SiCl4 MFC set to  0.000000
1/21/2012	4:48:58 PM	Bypass solenoid MFC set to  0.000000
1/21/2012	4:48:58 PM	Tube furnace set to 750
1/21/2012	5:03:58 PM	H2 valve closed
1/21/2012	5:03:58 PM	BCl3 valve closed
1/21/2012	5:03:58 PM	PH3 valve closed
1/21/2012	5:03:58 PM	SiCl4 pre valve closed
1/21/2012	5:03:58 PM	SiCl4 post valve closed
1/21/2012	5:03:58 PM	Main Vac valve closed
1/21/2012	5:03:58 PM	Bypass valve closed
1/21/2012	5:03:58 PM	Helium valve opened
1/21/2012	5:03:58 PM	Bubbler valve opened
1/21/2012	5:03:58 PM	Helium MFC set to  500.000000
1/21/2012	5:03:58 PM	H2 MFC set to  0.000000
1/21/2012	5:03:58 PM	BCl3 MFC set to  0.000000
1/21/2012	5:03:58 PM	PH3 MFC set to  0.000000
1/21/2012	5:03:58 PM	SiCl4 MFC set to  0.000000
1/21/2012	5:03:58 PM	Bypass solenoid MFC set to  0.000000
1/21/2012	5:03:58 PM	Tube furnace set to 0
1/21/2012	5:23:58 PM	Helium valve closed
1/21/2012	5:23:58 PM	H2 valve closed
1/21/2012	5:23:58 PM	BCl3 valve closed
1/21/2012	5:23:58 PM	PH3 valve closed
1/21/2012	5:23:58 PM	SiCl4 pre valve closed
1/21/2012	5:23:58 PM	SiCl4 post valve closed
1/21/2012	5:23:58 PM	Main Vac valve closed
1/21/2012	5:23:58 PM	Bypass valve closed
1/21/2012	5:23:58 PM	Bubbler valve closed
1/21/2012	5:23:58 PM	Helium MFC set to  0.000000
1/21/2012	5:23:58 PM	H2 MFC set to  0.000000
1/21/2012	5:23:58 PM	BCl3 MFC set to  0.000000
1/21/2012	5:23:58 PM	PH3 MFC set to  0.000000
1/21/2012	5:23:58 PM	SiCl4 MFC set to  0.000000
1/21/2012	5:23:58 PM	Bypass solenoid MFC set to  0.000000
1/21/2012	5:23:58 PM	Tube furnace set to 0
1/21/2012	5:43:58 PM	Helium valve closed
1/21/2012	5:43:58 PM	H2 valve closed
1/21/2012	5:43:58 PM	BCl3 valve closed
1/21/2012	5:43:58 PM	PH3 valve closed
1/21/2012	5:43:58 PM	SiCl4 pre valve closed
1/21/2012	5:43:58 PM	SiCl4 post valve closed
1/21/2012	5:43:58 PM	Main Vac valve closed
1/21/2012	5:43:58 PM	Bubbler valve closed
1/21/2012	5:43:58 PM	Bypass valve opened
1/21/2012	5:43:58 PM	Helium MFC set to  0.000000
1/21/2012	5:43:58 PM	H2 MFC set to  0.000000
1/21/2012	5:43:58 PM	BCl3 MFC set to  0.000000
1/21/2012	5:43:58 PM	PH3 MFC set to  0.000000
1/21/2012	5:43:58 PM	SiCl4 MFC set to  0.000000
1/21/2012	5:43:58 PM	Bypass solenoid MFC set to  0.000000
1/21/2012	5:43:58 PM	Tube furnace set to 0
1/21/2012	5:44:43 PM	Helium valve closed
1/21/2012	5:44:43 PM	H2 valve closed
1/21/2012	5:44:43 PM	BCl3 valve closed
1/21/2012	5:44:43 PM	PH3 valve closed
1/21/2012	5:44:43 PM	SiCl4 pre valve closed
1/21/2012	5:44:43 PM	SiCl4 post valve closed
1/21/2012	5:44:43 PM	Main Vac valve closed
1/21/2012	5:44:43 PM	Bubbler valve closed
1/21/2012	5:44:43 PM	Bypass valve opened
1/21/2012	5:44:43 PM	Helium MFC set to  0.000000
1/21/2012	5:44:43 PM	H2 MFC set to  0.000000
1/21/2012	5:44:43 PM	BCl3 MFC set to  0.000000
1/21/2012	5:44:43 PM	PH3 MFC set to  0.000000
1/21/2012	5:44:43 PM	SiCl4 MFC set to  0.000000
1/21/2012	5:44:43 PM	Bypass solenoid MFC set to  0.000000
1/21/2012	5:44:43 PM	Tube furnace set to 0
1/21/2012	5:45:43 PM	Helium valve closed
1/21/2012	5:45:43 PM	H2 valve closed
1/21/2012	5:45:43 PM	BCl3 valve closed
1/21/2012	5:45:43 PM	PH3 valve closed
1/21/2012	5:45:43 PM	SiCl4 pre valve closed
1/21/2012	5:45:43 PM	SiCl4 post valve closed
1/21/2012	5:45:43 PM	Bypass valve closed
1/21/2012	5:45:43 PM	Bubbler valve closed
1/21/2012	5:45:43 PM	Main Vac valve opened
1/21/2012	5:45:43 PM	Helium MFC set to  0.000000
1/21/2012	5:45:43 PM	H2 MFC set to  0.000000
1/21/2012	5:45:43 PM	BCl3 MFC set to  0.000000
1/21/2012	5:45:43 PM	PH3 MFC set to  0.000000
1/21/2012	5:45:43 PM	SiCl4 MFC set to  0.000000
1/21/2012	5:45:43 PM	Bypass solenoid MFC set to  0.000000
1/21/2012	5:45:43 PM	Tube furnace set to 0
1/21/2012	6:45:43 PM	Run finished at 6:45 PM
